|
|
|
Linear Scans |
Yes |
|
Scan Length Range |
500μm(typically, 450μm minimum) |
|
Data Points Per Scan |
Up to 10,000 points |
|
Vertical Range |
15μm (typically, 13.5μm minimum) |
|
Vertical Resolution |
2Å (least significant bit) |
|
Step Height Repeatability |
1nm (1s on 0.1μm step) or 0.1%, whichever is larger |
|
Scan Speed |
1 - 100μm/sec |
|
SYSTEM |
|
|
Targeting Microscopic Camera |
Fixed magnification, 8mm FOV [100X with 15in. Monitor] |
|
Stylus Radius |
5μm/ 2μm |
|
Stylus Material |
Diamond coated |
|
Stylus Force |
0.1 - 50mg |
|
Sample Stage Dimension |
70x70mm |
|
Sample Stage Translation |
Manual X/Y, 12mm x 12mm |
|
Sample Thickness |
10mm |
|
Sample Weight |
50g |
|
Computer System Requirement |
CPU: 1GHz; RAM: 2GB; USB 2.0 |
|
Software |
Scan control software on Windows XP or later Profile measurement software; Report generator software; |
|
Vibration Detection and Isolation |
Embedded environment vibration detector |
|
SOFTWARE |
|
|
Step Analysis |
Point-to-point, Avg. step height |
|
Auto-Leveling |
Yes |
|
High Order Flatten |
Yes |
|
Roughness and Waviness Analysis |
Ra, Rq, Rp, Rz, Ry, Rmax, Wa, Wq, Wp, Wz, Wy, Wmax |
|
Filter |
Moving average, Low pass, High pass |
|
Raw Data Export |
Yes |
|
Scan Report Generator |
Yes |
|
FACILITY REQUIREMENTS |
|
|
Power |
100 - 240 VAC, 50/60Hz, 100W |
|
Weight |
10kg |
|
Temperature Range |
25±2 °C |
|
Humidity Range |
70%, non-condensing |
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