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3-axis Nano-positioner
High voltage amplifier

 

Including:

1.3-axis Nano-positioner (Model: NP-T-10)

2.High voltage amplifier (Model: E-T-10)

 

3-axis Nano-positioner (Model: NP-T-10)

unit

tolerance

Active axis (axes)

X/Y/Z 

 

 

Open-loop travel (X/Y/Z)

10/10/10

mm

+20% / -0%

Open-loop resolution

0.2

nm

typ.

Closed-loop travel

-

mm

calibrated

Closed-loop resolution

-

nm

typ.
#axis#奈米#nano#model#nm#定位器#壓電